(MEMBER OF THE T-ESC® FAMILY)
The Polymer Transfer ElectroStatic Carrier (Polymer T-ESC®) is a low cost Carrier solution for processes without high heat impact where only handling is in focus. Additionally it can be used for wafer flipping applications.
As an option there is a modified version of this mobile electrostatic carrier which is suited for spin etching in SEZ-Tools with Bernoulli Chucks. The special shape of the Polymer T-ESC® enables carrying a thin substrate through the process without creating residuals between carrier and thin wafer during the etching process.