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(MEMBER OF THE T-ESC® FAMILY)

Polymer T-ESC®

The Polymer Transfer ElectroStatic Carrier (Polymer T-ESC®) is a low cost Carrier solution for processes without high heat impact where only handling is in focus. Additionally it can be used for wafer flipping applications.

As an option there is a modified version of this mobile electrostatic carrier which is suited for spin etching in SEZ-Tools with Bernoulli Chucks. The special shape of the Polymer T-ESC® enables carrying a thin substrate through the process without creating residuals between carrier and thin wafer during the etching process.

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